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In this work, an Aluminum Scandium Nitride (AlScN) on Diamond Sezawa mode surface acoustic wave (SAW) platform for RF filtering at Ku-band (12-18 GHz) is demonstrated. Thanks to the high acoustic velocity and low-loss diamond substrate, the prototype resonator at 12.9 GHz achieves a high phase velocity (𝑣𝑣p) of 8671 m/s, a maximum Bode-Q of 408, and coupling coefficient (𝑘𝑘eff 2 )of 2.1%, outperforming high-velocity substrates such as SiC and sapphire by more than 20% in velocity. Resonators spanning 8 to 18 GHz are presented. The platform’s high power handling above 12.5 dBm is also experimentally validated. 

This letter presents a versatile design method for achieving precise frequency and bandwidth control of compact acoustic filters monolithically at millimeter wave (mmWave) in transferred thin-film lithium niobate (LiNbO3). Prototypes are implemented with lateral field excited first-order antisymmetric (A1) mode bulk acoustic resonators (XBARs). The design leverages the in-plane anisotropy of the e15 piezoelectric coefficient in 128° Y-cut LiNbO3, enabling monolithic control of electromechanical coupling ( k2 ) by simply rotating the resonator layout. This allows for filters with customizable fractional bandwidths (FBWs). Additionally, fine-tuning of the center frequency ( fc ) is achieved through selective trimming of the film for series and shunt resonators, enabling a single design to be scaled across frequencies with enhanced fabrication tolerance. To validate the approach, we designed and fabricated a filter centered at 18.6GHz, achieving a low insertion loss (IL) of 1.84 dB, and a precise designed FBW of 9.5%. This platform shows a significant promise for enabling a monolithic filter bank with precise band selection, paving the way for the next generation of mmWave acoustic filters.